Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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Status	UP
Issue Date and Description
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Responding Staff

iLab Name: VASE Ellipsometer
iLab Kiosk: BRK Metrology Core
FIC: Alexandra Boltasseva
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size:

Overview

General Description

Automated UV-VIS-NIR spectroscopic variable incidence angle ellipsometer

Specifications

Linear complex dielectric constant measurements of materials; additionally capable of agular-resolved transmission and reflection spectroscopy.

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer

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