J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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StatusUP
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iLab Name: VASE Ellipsometer
iLab Kiosk: BRK Metrology Core
FIC:
Alexandra Boltasseva
Owner: Alexei Lagoutchev
Location:
BRK 1273
Maximum Wafer Size: 

Overview

General Description

Automated UV-VIS-NIR spectroscopic variable incidence angle ellipsometer

Specifications

Linear complex dielectric constant measurements of materials; additionally capable of agular-resolved transmission and reflection spectroscopy.

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Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library


References