J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer
Status | UP |
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iLab Name: VASE Ellipsometer
iLab Kiosk: BRK Metrology Core
FIC: Alexandra Boltasseva
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size:
Overview
General Description
Automated UV-VIS-NIR spectroscopic variable incidence angle ellipsometer
Specifications
Linear complex dielectric constant measurements of materials; additionally capable of agular-resolved transmission and reflection spectroscopy.
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Standard Operating Procedure
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