J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer

Owned by Former user (Deleted)
Last updated: Feb 05, 2019 by Wirth, Justin C


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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iLab Name: VASE Ellipsometer
iLab Kiosk: BRK Metrology Core
FIC: Alexandra Boltasseva
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size: 

Overview

General Description

Automated UV-VIS-NIR spectroscopic variable incidence angle ellipsometer

Specifications

Linear complex dielectric constant measurements of materials; additionally capable of agular-resolved transmission and reflection spectroscopy.

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References