J.A. Woollam V-VASE UV-VIS-NIR spectroscopic ellipsometer

Owned by Former user (Deleted)
Last updated: Feb 05, 2019 by Wirth, Justin C

2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

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Responding Staff


iLab Name: VASE Ellipsometer
iLab Kiosk: BRK Metrology Core
FIC: Alexandra Boltasseva
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size: 

Overview

General Description

Automated UV-VIS-NIR spectroscopic variable incidence angle ellipsometer

Specifications

Linear complex dielectric constant measurements of materials; additionally capable of agular-resolved transmission and reflection spectroscopy.

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References