Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: Lambda 950
iLab Kiosk: BRK Metrology Core
FIC: Vladimir Shalaev
Owner: Alexei Lagoutchev
Location: BRK 1273
Maximum Wafer Size:

Overview

General Description

Traditional dual-beam spectrophotometer equipped with integrating sphere option to acquire spectra of diffuse light.

Specifications

Complete UV-VIS-NIR spectroscopic characterization of solid and liquid samples in transmission and reflection modes with separately measurable back and forward scattering.

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

PerkinElmer Lambda950 UV-VIS-NIR spectrophotometer

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