PerkinElmer Lambda950 UV-VIS-NIR spectrophotometer


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status
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StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Lambda 950
iLab Kiosk: BRK Metrology Core
FIC:
Vladimir Shalaev
Owner: Alexei Lagoutchev
Location:
BRK 1273
Maximum Wafer Size: 

Overview

General Description

Traditional dual-beam spectrophotometer equipped with integrating sphere option to acquire spectra of diffuse light.

Specifications

Complete UV-VIS-NIR spectroscopic characterization of solid and liquid samples in transmission and reflection modes with separately measurable back and forward scattering.

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library


References