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Overview

General Description

Wafer-scale semi-automatic vacuum probe station equipped with 4 DC and 2 RF (to 67 GHz) probes as well as a probe card feedthrough. The chuck can be heated to 300 C, and can also be voltage biased for body-biasing. Adapters for clamping arrays of 10x10 mm or 26x26 mm coupons are also provided.

Specifications

Vacuum from 1e-4 torr up to atmosphere in air or N2.
Chuck temperature from 20 C up to 300 C.
Chuck biasing from -40 V to +40V DC.
Sample size: 8" wafer, 5x5mm or 10x10mm coupon. Adapters to other sample sizes can be purchased.
2x RF probes are G-S-G design with 150 um pitch and rated up to 67 GHz.
On-board software control allows semi-auto die-scale array probing (probes lift-move-drop) integrated with measurements on parameter analyzer or other electronics.

Standard Operating Procedure

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References

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