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Overview

General Description

A vacuum probe station for DC, RF, and optic fiber probing from low temperatures (4.5 K) up to 350 K. Uses a cryocooler to eliminate the need for liquid helium consumption.

Specifications

Sample chuck 50x50mm can be probed by 4 DC probes and 2 RF (GSG, up to 40 GHz) probes, or alternately by 2 optical fiber arms with multiple fibers on each arm. There are 6 probe ports. The cryocooler enables a temperature range at the sample of 4.5 - 350 K. There is an option to use a biased (triax) chuck for sample body biasing.

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

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Process Control Information

Process Control Context

Process Control Charts

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.