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Overview

General Description

Probe station for measurement of device electrical properties from 25 - 900 C in vacuum (10^-5 torr)

Specifications

For the temperature range up to 900 C, 4 DC needle probes are provided which can measure up to ~MHz.
For temperatures below 550 C, there is also RF probing (to 40 GHz) as well as N2 partial pressure up to 0.5 atm.
There is an option of using a biased chuck (using an additional chuck on AlN isolation plates).
Sample chuck is 2x2".

Technology Overview - Remove if multiple tools use the same technology/process

 Description of the science behind the process. Include figures and diagrams if applicable.

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

Standard procedure for tool operation, base off established Birck SOPs.

Process Control Information

Process Control Context

Process Control Charts

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.