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Overview

General Description

Probe station for measurement of device electrical properties from 25 - 900 C in vacuum (10^-5 torr)

Specifications

For the temperature range up to 900 C, 4 DC needle probes are provided which can measure up to ~MHz.
For temperatures below 550 C, there is also RF probing (to 40 GHz) as well as N2 partial pressure up to 0.5 atm.
There is an option of using a biased chuck (using an additional chuck on AlN isolation plates).
Sample chuck is 2x2".

Technology Overview - Remove if multiple tools use the same technology/process

 Description of the science behind the process. Include figures and diagrams if applicable.

Sample Requirements and Preparation

Samples that may be used in the tool, materials that are compatible/incompatible, and the required cleaning before the tool may be used. May include both an "ideal" clean and a minimum required clean. Also include BOE/oxide removal, dehydration, or any recommended post process steps.

Standard Operating Procedure

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Process Control Information

Process Control Context

Process Control Charts

Questions & Troubleshooting

Question about tool use or process result?
Answer to question.

Process Library

Create process template for tool, allows a user to fill in the details of their process. 

References

Manufacturer brochures, specifications, papers with relevant info on process, and presentations covering the technology. Confluence lacks a native reference feature, so these are added as links.