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Fabrication
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Deposition
Atomic Layer Deposition (ALD)
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CHA E-Beam Evaporator #1
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CHA E-Beam Evaporator #2
Lesker E-Beam Evaporator - Flexible Substrate Compatible
Lesker Kiosk Home Page
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1. Lesker E-Beam Initial State Check
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2. Lesker E-Beam Vent Chamber to Atmosphere
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3. Lesker E-Beam Raise the Bell Jar
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4. Lesker E-Beam Sample Loading
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5. Lesker E-Beam Lowering the Bell Jar
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6. Lesker E-Beam Evacuate to Low Vacuum
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7. Lesker E-Beam Evacuate to High Vacuum
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8. Lesker E-Beam Inficon Controller Configuration
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9. Lesker E-Beam Material Deposition
Leybold E-Beam Evaporator
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PVD E-Beam Evaporator - Metal/Magnetic Sources
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PVD E-Beam Evaporator - Glancing Angle Deposition (GLAD)
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6. Lesker E-Beam Evacuate to Low Vacuum
6. Lesker E-Beam Evacuate to Low Vacuum
Former user (Deleted)
Owned by
Former user (Deleted)
Last updated:
May 12, 2019
1 min read
Loading data...
Close the vent valve
Open the rough valve
Wait for pressure to drop below 5 x 10-2 torr (50 mTorr)
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