SPI Sputter and Carbon Coaters for SEM

Operation Video from SPI

• Au-Pd coating procedure

• Carbon coating procedure

Maintenance Video from SPI

• Changing carbon fiber

Replacement Parts

• SPI Supplies: https://www.2spi.com/category/coating-systems-rp/sputter-carbon-coaters/

• Needle Valve (Gas Leak Valve at Vacuum Control Base): 11425N-AB or VM31/1

• O-rings for Pyrex Chamber: 11458-AB or VM24/1

Documents

• SPI Manual for Vacuum Control Base Module

• SPI Manual for Sputter Module

• SPI Manual for Carbon Coater Module