Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
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Issue Date and Description
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Responding Staff

iLab Name: Cascade PMC200
iLab Kiosk: BRK Characterization Core
FIC: Dana Weinstein
Owner: Nithin Raghunathan
Location: Cleanroom - J Bay
Maximum Wafer Size:

Overview

General Description

The PMC200 can be used for testing wafers and substrates up to 200 mm in a cryogenic environment. It is capable of a wide range of measurements including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 4 K with liquid helium. Application flexibility is ensured for DC and RF measurements of micro fabricated devices.

PMC200 is outfitted a video microscope and RF micro-positioners for RF & DC measurements.

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Suss PLV50 DC Probe Station

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