Suss PLV50 DC Probe Station

Owned by Neil Dilley
Jan 17, 2020
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Cascade PMC200
iLab Kiosk: BRK Characterization Core 
FIC: Dana Weinstein
Owner: Nithin Raghunathan
Location: Cleanroom - J Bay
Maximum Wafer Size: 

Overview

General Description

The PMC200 can be used for testing wafers and substrates up to 200 mm in a cryogenic environment. It is capable of a wide range of measurements including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 4 K with liquid helium. Application flexibility is ensured for DC and RF measurements of micro fabricated devices.

PMC200 is outfitted a video microscope and RF micro-positioners for RF & DC measurements.

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References