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Suss PLV50 DC Probe Station
Suss PLV50 DC Probe Station
iLab Name: Cascade PMC200
iLab Kiosk: BRK Characterization Core
FIC: Dana Weinstein
Owner: Nithin Raghunathan
Location: Cleanroom - J Bay
Maximum Wafer Size:
Overview
General Description
The PMC200 can be used for testing wafers and substrates up to 200 mm in a cryogenic environment. It is capable of a wide range of measurements including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 4 K with liquid helium. Application flexibility is ensured for DC and RF measurements of micro fabricated devices.
PMC200 is outfitted a video microscope and RF micro-positioners for RF & DC measurements.
Specifications
Technology Overview - Remove if multiple tools use the same technology/process
Sample Requirements and Preparation
Standard Operating Procedure
Questions & Troubleshooting
Process Library
References
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