Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: Cleanroom Probe 1
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station III consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156A Semiconductor Parameter Analyzer.

Specifications

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

MM 6000 Cleanroom DC Probe Station