MM 6000 Cleanroom DC Probe Station

Owned by Wirth, Justin C
Last updated: Jan 14, 2020 by Neil Dilley

2024-12-20 to 2025-01-02: Reduced Holiday Operations

Dear Birck Research Community,

The Purdue winter recess begins effective Friday afternoon December 20th and concludes Thursday morning, January 2. The university is officially closed during this time. As we have done in past years, the Birck Nanotechnology Center will remain available for research but will be unstaffed and hazardous gasses will be unavailable. Lab work may otherwise proceed, though any fume hood work must be done with someone else present in the same laboratory or cleanroom bay (the "buddy" system). Click the link above to get more detail about equipment conditions and rules.


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

StatusUP
Issue Date and Description


Estimated Fix Date and Comment

Responding Staff


iLab Name: Cleanroom Probe 1
iLab Kiosk:
FIC: Shared
Owner: Nithin Raghunathan
Location: Cleanroom - Q Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station III consists of a Micromanipulator 6000 in a dark box on top of a vibration isolation table. The test equipment consists of an HP4156A Semiconductor Parameter Analyzer.

Specifications

 

Sample Requirements and Preparation

 

Standard Operating Procedure


Questions & Troubleshooting


 

Process Library

References