Cascade PMC 200 DC/RF Probe Station

Owned by Former user (Deleted)
Last updated: Mar 16, 2022 by Neil Dilley
1 min read


Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

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Issue Date and Description


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Responding Staff


iLab Name: Cascade PMC200
iLab Kiosk: BRK Characterization Core 
FIC: Dana Weinstein
Owner: Dana Weinstein
Location: BRK 1083
Maximum Wafer Size: 

Overview

General Description

The PMC200 can be used for testing wafers and substrates up to 200 mm in a cryogenic environment. It is capable of a wide range of measurements including I-V, C-V and RF, and can be used for probing down to 77 K with liquid nitrogen or 4 K with liquid helium. Application flexibility is ensured for DC and RF measurements of micro fabricated devices.

PMC200 is outfitted a video microscope and RF micro-positioners for RF & DC measurements.

Specifications

Technology Overview - Remove if multiple tools use the same technology/process

 


Sample Requirements and Preparation


Standard Operating Procedure


Questions & Troubleshooting



Process Library

References