Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name	Lakeshore CRX-VF Cryogenic Vertical Field Probe Station
iLab Kiosk	BRK Characterization Core
FIC	Joerg Appenzeller
Owner	Neil Dilley
Location	BRK 2069
Max. Wafer	2"/50 mm
Info Links	/wiki/spaces/BNCWiki/pages/6253158\| Staff

Overview

General Description

Vacuum probe station with vertical magnetic field and cryogenic temperatures for DC and RF probing of nanodevices.

Specifications

Probe station equipped with 4 DC probes and 2 RF (40 GHz) probes for probing samples up to 2" (50mm) diameter over a temperature range of ~10 K - 500 K and vertical (out of plane) magnetic field up to 2.5 tesla (derated to 2 tesla at 300 K). The chuck can be biased for body-biasing, and this biasing chuck can go up to 400 K.

Seminars

Sample Requirements and Preparation

The RF probes in use have 150 um pitch.

DC probes have 25 um tip radius, but smaller (down to 3 um) tips can be purchased.

Standard Operating Procedure

For a more extensive discussion, please refer to Chapter 4 of the CRX-VF manual.

For the operation procedures of the M81 electronic module, please see the following file

A supplementary document for resetting the Model 336 temperature controller

Control Samples

Probed device card (prototype): this has surface-mount devices on a small board that fits into the probe station (links in the attached PDF go to their datasheets):

1 GOhm resistor
3-terminal Hall sensor
blue LED
N-type JFET

Process Library

References

Servicing Y and Z Micrometers on LS probe stations.pdf

Lakeshore CRX-VF Cryogenic Vertical Field Probe Station