Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name:
iLab Kiosk:
FIC: Shared
Owner: N eil Dilley
Location: 2100- J (J-bay)
Maximum Wafer Size: 4"/100 mm

Overview

General Description

An Everbeing EB-6 high precision probe station is available for DC wafer probing. There is a Tektronix 4200-SCS Semiconductor Parameter Analyzer for both IV and CV measurements to collect the data. Details on the parameter analyzer are available here : https://www.tek.com/keithley-4200a-scs-parameter-analyzer-manual-1

Features

Low profile coaxial-driven style stage (optional large knob precision stage)
Back-lash free movement
Mounting for 12 micropositioners
4.5” Probe Card Holder compatible
Micropositioner Standby Dock
Microscope Tilting for E-Z lens switching

Applications

Basic IV/CV
RF, Single Broadband Probing
High Voltage, High Current

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

References
EB-6 Data sheet

Birck Nanotechnology Center Wiki

EverBeing EB-6 Probe Station

Analytics

General Description

Sample Requirements and Preparation

Standard Operating Procedure

Questions & Troubleshooting

References

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