Refer to the Material and Process Compatibility page for information on materials compatible with this tool.
Equipment Status: Set as UP, PROBLEM, or DOWN, and report the issue date (MM/DD) and a brief description. Italicized fields will be filled in by BNC Staff in response to issues. See Problem Reporting Guide for more info.

Status	UP
Issue Date and Description
Estimated Fix Date and Comment
Responding Staff

iLab Name: P robe 1
iLab Kiosk: BRK Characterization Core
FIC: Shared
Owner: N eil Dilley
Location: J Bay
Maximum Wafer Size: 4"/100 mm

Overview

General Description

Probe Station I consists of a Cascade MPS150 in a dark box on top of a vibration isolation table. The test equipment consists of two Keithley 4200A-SCS Semiconductor Parameter Analyzers, one equipped with C-V measurement capability. Also available is an HP 4284A LCR meter. A heated stage (ERS model AC3) provides temperature control up to 200 C with sample sitting in ambient air.

Sample Requirements and Preparation

Standard Operating Procedures

Probe 1 MPS150 - SOP.pdf

SOP Radiant Premier II ferroelectric tester.pdf

Questions & Troubleshooting

Birck Nanotechnology Center Wiki

Probe 1 - Cascade MPS150 DC Probe Station

Analytics

Overview

General Description

Sample Requirements and Preparation

Standard Operating Procedures

Questions & Troubleshooting

Process Library

References

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